Documentation
 Documentation (fsemdoc.pdf).
 Presentation slides
(Presented at University Paris 6 IHP). Note that
the syntax presented in the slides has been slightly modified since then).

Published Journal Papers using FSEM:
F. Dortu, T. Clarysse, R. Loo and W. Vandervorst, Extracting active dopant profile information from carrier illumination power curves,
J. Vac. Sci. Technol. 24(1), 375 (2006)
F. Dortu, T. Clarysse, R. Loo, B. Pawlak, R. Delhougne and W. Vandervorst, Progress in the physical modeling of carrier illumination,
J. Vac. Sci. Technol. 24(3), 1131 (2006)